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Inspectrology’s IVS Overlay and CD Metrology Systems have been the gold standard for reliability in fabs for over 30 years


With world wide support and representatives in every major market, Inspectrology is well positioned to provide the support needed to keep fabs running at peak efficiency

We Specialize in supporting small factories where 1 or 2 systems are installed. We understand the needs to keep up time at 100% and mean time between failures to months and years instead of days and weeks.

Inspectrology is your complete, reliable solution provider for quality Metrology sales and services.

With decades of Metrology experience, the semiconductor professionals at Inspectrology provides full service support, metrology products, metrology standards, and educational training services to fabs worldwide.

Inspectrology provides Metrology System sales and services to fabs in a wide range of market sectors including Microelectromechanical systems (MEMS), Semiconductor, Compound Semiconductor (GaAs, GaN, SiC, SOI etc), LED (Light Emitting Diode) and Solar.


Metrology Systems and Products

Inspectrology carries a complete line of new and rebuilt IVS Metrology Systems. IVS Metrology systems have been providing reliable, robust measurements to fabs world wide for 30 years.

Each rebuilt system is expertly refurbished by the engineers who designed them. IVS Metrology Systems feature unsurpassed wafer measurement capability on the toughest layers, CD & overlay measurements in the same recipe and a host of other features. Our engineers employ best practices to completely refurbish and recondition every IVS Metrology System we sell.

Inspectrology’s Clear Wafer Aligner is an innovative imaging source used to facilitate the alignment of transparent wafers such as Silicon Carbide, Gallium Nitride and Saphire.


Replacement Parts for IVS Metrology Systems

Cybeq2831PrealignerInspectrology carries a complete line of replacement parts for the entire line of IVS Metrology Systems. We can provide you with many new parts for your  IVS System. We also have a complete line of IVS System parts have been expertly refurbished in house by our own IVS system engineers.


IVS Metrology System Support Services

Inspectrology offers comprehensive support services for all IVS Metrology systems, including Service Contracts, Preventative Maintenance Services and Emergency Service. In addition we offer a wide range of educational services, including System Training for IVS Metrology Systems. The people who know these systems best, the original designers and developers of the IVS Metrology systems, also provide this outstanding IVS System Training.


Metrology Industry Resources

WaferAs dedicated metrology professionals, Inspectrology engineers have contributed metrology technical papers and other important research material regularly. We also partner with leading metrology and wafer inspection companies to ensure total support and service to all of our customers worldwide.


Contact Inspectrology today for all your metrology needs.

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