Products

Discover the power of software with advanced process control and yield management software tools designed to link information across an entire global value supply chain.

High-speed, automated inspection with powerful data analysis tools to improve process control from bare silicon to advanced packaging.

Optical critical dimension (OCD) metrology and opaque and transparent film stack metrology for FEOL, BEOL and WLP processes. Overlay and CD metrology for the semiconductor, compound semi, power devices, RF, MEMS, and LED markets.

FTIR (Fourier Transform Infrared) is the most important technology for measuring epitaxial film (Epi) thickness, measuring impurities in silicon and monitoring dielectrics, like Borophosphosilicate glass (BPSG), FSG, PSG, etc in semiconductor industry.

High resolution steppers for advanced packaging and flat panel display technology

Automated probe card test and repair helps ensure cards are ready and capable of testing semiconductor devices.