IVS 185 Metrology System
Inspectrology’s IVS 185 is manufactured in our Sudbury, Massachusetts USA factory, just a few miles from where it was designed. The IVS 185 is the work horse of CD and Overlay metrology systems. The IVS 185 is the latest generation of the IVS line of CD and Overlay Metrology systems which started with the IVS 100, IVS 120, IVS 130, IVS 135, IVS 155, and IVS 165.
IVS-185 – 75-200 mm White Light Optical CD and Overlay Metrology for Semiconductor, LED and MEMS.
The cornerstone of the IVS-185’s unbeatable reliability and stability is its mean-time between failure (MTBF) of 1800 hours. The IVS-185 leads the industry, ensuring optimal system availability and years of problem-free operation. The robust design of the wafer handling and navigation system requires no operator assistance during recipe execution. Recipes and data remain stable over time.
Versatile wafer handling accommodates many variations in wafer composition including silicon carbide, quartz, glass, GaAs, GaN, and slotted wafers of various sizes. Square substrates are also supported.
Another unique characteristic of the IVS-185 is Multi-Z, which enables measurement of up to four planes in a consistent field of view inside a single measurement sequence. Multi-Z is capable of performing as many as 10 separate measurements at the same time, maximizing data collection and throughput.
The IVS-185 delivers unparalleled measurement performance on all layers with CD and overlay measurements in the same recipe. Specific algorithms for MEMS applications allow for measurement of a wide array of MEMS structures. The proven capabilities of the IVS 185 to perform with high precision and rock solid reliability set this system apart.
IVS Pre-Owned Metrology Systems
Inspectrology is the number one supplier for certified, rebuilt IVS Metrology Systems.
IVS Metrology Systems are unsurpassed in system reliability. This rock solid reliability is combined with flexibleautomation, high productivity, and of course, accurate repeatable measurements.The engineers who designed the IVS Metrology Systems recondition all of these systems to factory specifications, here in our Massachusetts Headquarters.
Advanced Submicron Metrology requirements are all skillfully fulfilled by IVS Metrology Systems with comprehensive system feature sets, including:
– CD & overlay measurements in the same recipe
– Unsurpassed measurement capability on the toughest layers
– Industry’s best reliability over 1800 hours MTBF guaranteed
– Adaptive algorithms that adjust to process variations
– Off-line recipe creation with the Remote Job Generator speed work
– Proven on copper, STI, and tungsten plug
– Advanced Structural Metrology Algorithms including CD-Z, CD-Offset, CD-Step, die matrix placement, and adaptive contact
– Advanced automation with <0.1 degree pre-alignment accuracy
– MEMS Specific algorithms
– Lowest cost of ownership
Our engineers employ best practices to completely refurbish and recondition every IVS Metrology System we sell, including the IVS 120, IVS 130, IVS 135, IVS 155, IVS 165 and IVS185. Each system component, including Robots, Prealigners, Microscope Parts, Focus Module, Apertures and Turret are thoroughly inspected and brought up to factory specifications.
These professionally reconditioned pre-owned IVS Metrology Systems are all available for immediate delivery.
Contact us today to arrange a demonstration.
Inspectrology is also a partner and authorized reseller for Benchmark Technologies metrology software and reticles. Benchmark reticles and software are used throughout the world by leading chip makers and equipment manufacturers.
Benchmark Technologies Phase Shift Focus Monitor (PSFM) Test Reticle is the standard by which lithographers evaluate scanner and stepper focus and lens performance. This PSFM Test Reticle enhances lithography-tool performance, improves overall tool throughput and evaluates and compares new and installed lithography tools.
Inspectrology is a partner and authorized reseller for Metroboost. Metroboost produces software products for the metrology industry including MetroView and Overlay Booster.
Overlay Booster is a Windows-based software package for control and optimization of overlay and registration in lithography tools.MetroView is easy-to-use software for Critical Dimension data viewing and monitoring. MetroView takes advantage of stored SEM images to shorten lot disposition time and reduce scrap. MetroCal is a standard wafer that has traceability to NIST.
Contact us today for fast shipment of any of the fine Benchmark Technologies or MetroBoost metrology products.
Inspectrology Windows Integrated Server
The Inspectrology Windows Integrated Server is a rack mounted Windows server with guaranteed compatibility, including networking capability, to the IVS system and your fab network. This allows for robust data and recipe storage and file management throughout your fab, through a Windows XP Pro interface.
Our Windows Integrated Server contains Raid hard drives for outstanding reliability and an LCD monitor replaces the CRT monitor for both ACV and Windows applications. Features of the Windows Integrated Server include being able to switch from DOS to Windows with one key instantly and the ability to review data and recipes while your IVS tool is running.
Contact us today for more information on this comprehensive fab intermigration device.
Inspectrology Clear Wafer Aligner
Inspectrology has just launched a new exclusive product for SiC, GaN, Quartz, and other clear substrates. This incorporates the IDE SPA-310 pre-aligner, proprietary firmware, and a new imaging source to facilitate alignment of clear wafers, which often present a challenge to existing pre-aligners.
Contact us today for more information on this exciting new metrology product.
i4 Inspection Module
The Inspectrology i4 Inspection Module turns your IVS metrology system into a fully automated defect inspection system. This unique inspection device connects to any IVS Metrology tool. As the IVS system is running a job, the i4 Inspection Module captures images of the wafer and stores them on a network drive.
The i4 Inspection Module takes the stored images and inspects them for defects. Three distinct Defect Detection Algorithms are available.
Contact us today for a demonstration and evaluation of this powerful wafer inspection tool.